Microsensors: Principles and Applications
Microsensors: Principles and Applications
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The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples., ISBN13: 9780471941354 ISBN10: 0471941352 Material Type: hardcover
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